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  4. Electromechanical design space exploration for electrostatically actuated ohmic switches using extended parallel plate compact model
 
research article

Electromechanical design space exploration for electrostatically actuated ohmic switches using extended parallel plate compact model

Bazigos, Antonios  
•
Ayala, Christopher L.
•
Rana, Sunil
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2014
Solid-State Electronics

The nanoscaled electrostatically actuated electromechanical ohmic switch is an emerging device with advanced performance in terms of ION/IOFF ratio. It is imperative that compact models accompany such novel devices in order to fully evaluate their potential at the circuit-level. A minimal, yet, adequate compact model is developed and analyzed in this work. Further, the model is used as a compass for switch design space exploration and, simultaneously, a corresponding parameter extraction methodology is compiled. The application on data from numerical simulations and on measurements of fabricated devices, verifies the potential of the model, while circuit-level simulations validate its robustness within an industrial IC design environment.

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Type
research article
DOI
10.1016/j.sse.2014.06.030
Web of Science ID

WOS:000340220500017

Author(s)
Bazigos, Antonios  
Ayala, Christopher L.
Rana, Sunil
Grogg, Daniel
Fernandez-Bolaños, Montserrat
Hagleitner, Christoph
Qin, Tian
Pamunuwa, Dinesh
Ionescu, Adrian M.  
Date Issued

2014

Publisher

Elsevier

Published in
Solid-State Electronics
Volume

99

Start page

93

End page

100

Subjects

FP7

•

NEMIAC

•

NEMS

•

MEMS

•

compact modelling

•

electrostatic actuation

•

ohmic switch

•

Parameter extraction methodology

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

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Available on Infoscience
September 19, 2014
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/106997
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