research article
Integrated Shielding lines on Multilayer Polysilicon Resonators
Type
research article
Author(s)
Date Issued
1994
Published in
Volume
43
Start page
351
End page
356
Note
115
Editorial or Peer reviewed
REVIEWED
Written at
OTHER
EPFL units
Available on Infoscience
May 12, 2009
Use this identifier to reference this record