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Klein, M. J. K., Eckert, R., Guillaumée, M., Dunbar, L. A., Heinzelmann, H., Brugger, J., & Pugin, R. (2011). GOLD MEMBRANES WITH LARGE ARRAYS OF SUB-µm HOLES FABRICATED BY WAFER-SCALE NANOSPHERE LITHOGRAPHY. The 16th International Conference on Solid-State Sensors, Actuators and Microsystems, Beijing, China. https://infoscience.epfl.ch/handle/20.500.14299/67392

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