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  4. Fast non-contact surface roughness measurements up to the micrometer range by dual-wavelength digital holographic microscopy
 
conference paper

Fast non-contact surface roughness measurements up to the micrometer range by dual-wavelength digital holographic microscopy

Kühn, Jonas
•
Solanas Vilar, Eduardo
•
Bourquin, Sébastien
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2010
Optical Micro- and Nanometrology III
Photonics Europe 2010

We present fast high-roughness and non-contact surface measurements by digital holographic microscopy (DHM). By using single- and dual-wavelength operation modes, coupled with advanced image stitching and non-measured points management methods, the technique enables two-dimensional roughness measurements up to the micrometer (N6). The sample is mechanically scanned over a surface up to 5 × 0.3 mm2 with 17 holograms each acquired in less than 500 µs, the corresponding phase images stitched together by software, and therefore providing multiple profiles measurement in the ISO definition in less than 30 s. The approach is validated by inspection of several different roughness standards and our technique is demonstrated to be in agreement with two existing well-known techniques in the field.

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Type
conference paper
DOI
10.1117/12.854550
Web of Science ID

WOS:000285182000003

Author(s)
Kühn, Jonas
Solanas Vilar, Eduardo
Bourquin, Sébastien
Blaser, Jean-François
Dorigatti, Luca
Keist, Thierry
Emery, Yves
Depeursinge, Christian  
Date Issued

2010

Publisher

SPIE

Published in
Optical Micro- and Nanometrology III
Series title/Series vol.

Proceedings of SPIE-The International Society for Optical Engineering

Volume

7718

Start page

771805

Subjects

[MVD]

URL

URL

http://spiedigitallibrary.aip.org/getabs/servlet/GetabsServlet?prog=normal&id=PSISDG007718000001771805000001&idtype=cvips&gifs=Yes&bproc=symp&scode=EPE10&ref=no
Editorial or Peer reviewed

NON-REVIEWED

Written at

EPFL

EPFL units
LOA  
Event nameEvent placeEvent date
Photonics Europe 2010

Bruxelles, Belgium

April 13-15, 2010

Available on Infoscience
April 21, 2010
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/49588
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