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research article

The Vibrating Body Transistor

Grogg, Daniel
•
Ionescu, Adrian Mihai  
2011
IEEE Transactions on Electron Devices

This paper presents a hybrid resonator architecture called the vibrating body field-effect transistor (VB-FET), which combines a silicon microelectromechanical (MEM) resonator and a FET in a single device. The active device provides improved motion sensing at the mechanical resonance based on charge-and/or piezoresistive-drain-current modulations. We detail the principles of the VB-FET for a clamped-clamped-beam resonator design. The different transduction mechanisms occurring in this structure are discussed, and the benefit of the FET detection with respect to the capacitive transduction in terms of reduced motional resistance is highlighted. The experimental characteristics of the resulting devices are detailed, including a full scattering-parameter characterization and temperature characterizations. An increase in the signal transmission by more than +30 dB over the conventional capacitive transduction is demonstrated under equivalent biasing conditions at 2 MHz. Intrinsic signal amplification in a hybrid MEM resonator is another unique property of active resonators demonstrated in this paper for VB-FET resonators.

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Type
research article
DOI
10.1109/TED.2011.2147786
Web of Science ID

WOS:000291952900038

Author(s)
Grogg, Daniel
Ionescu, Adrian Mihai  
Date Issued

2011

Published in
IEEE Transactions on Electron Devices
Volume

58

Start page

2113

End page

2121

Subjects

Field-effect transistor

•

hybrid microelectromechanical field-effect-transistor (MEM-FET) device

•

microelectromechanical-system (MEMS) device

•

quality factor (Q-factor)

•

resonator

•

transistor

•

Resonators

•

Systems

•

Temperature

•

Gaps

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
NANOLAB  
Available on Infoscience
December 16, 2011
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/73927
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