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research article

Characterization of microlenses by digital holographic microscopy

Charrière, Florian  
•
Kühn, Jonas
•
Colomb, Tristan  
Show more
2006
Applied Optics

We demonstrate the use of digital holographic microscopy (DHM) as a metrological tool in micro-optics testing. Measurement principles are compared with those performed with Twyman-Green, Mach-Zehnder, and white-light interferometers. Measurements performed on refractive microlenses with reflection DHM are compared with measurements performed with standard interferometers. Key features of DHM such as digital focusing, measurement of shape differences with respect to a perfect model, surface roughness measurements, and optical performance evaluation are discussed. The capability of imaging nonspherical lenses without any modification of the optomechanical setup is a key advantage of DHM compared with conventional measurement tools and is demonstrated on a cylindrical microlens and a square lens array.

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Type
research article
DOI
10.1364/AO.45.000829
Web of Science ID

WOS:000235387400003

Author(s)
Charrière, Florian  
Kühn, Jonas
Colomb, Tristan  
Montfort, Frédéric  
Cuche, Etienne  
Emery, Yves
Weible, Kenneth
Marquet, Pierre
Depeursinge, Christian  
Date Issued

2006

Published in
Applied Optics
Volume

45

Issue

5

Start page

829

End page

835

Subjects

[MVD]

•

Holography

•

Holography

•

Computer holography

•

Instrumentation

•

measurement and metrology

•

Lens design

•

Holography

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
LOA  
Available on Infoscience
July 20, 2009
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/41593
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