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research article

Fabrication of suspended microchannel resonators with integrated piezoelectric transduction

De Pastina, A
•
Maillard, D
•
Villanueva, LG
2018
Microelectronic Engineering
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Type
research article
DOI
10.1016/j.mee.2018.02.011
Web of Science ID

WOS:000428828500014

Author(s)
De Pastina, A
Maillard, D
Villanueva, LG
Date Issued

2018

Published in
Microelectronic Engineering
Volume

192

Start page

83

End page

87

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
NEMS  
Available on Infoscience
November 8, 2018
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/150269
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