A Glass-Like Carbon Mems Strain Sensor
Glass-like carbon (GC) has been widely used in micro-nano devices due to its excellent properties such as hardness, biocompatibility, and chemical inertness. In this work we investigate, for the first time, the piezoresistive behavior of GC in view of its potential applications in strain sensors. In particular, we present the structural and electrical properties of SU-8 derived GC thin films together with the fabrication and characterization of GC-based strain sensors. When mechanical displacement is applied to the GC strain sensors, the average gauge factors of the GC piezo-resistors pyrolyzed at 700 and 900 degrees C are 7.3 and 2.0, respectively.
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Jang, J., Panusa, G., Boero, G., & Brugger, J. (2021). A Glass-Like Carbon Mems Strain Sensor. 2021 21St International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers), International Solid-State Sensors Actuators and Microsystems Conference, 871–874. https://doi.org/10.1109/TRANSDUCERS50396.2021.9495726
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WOS:000707041600229
2021-01-01
New York
978-0-7381-2562-6
International Solid-State Sensors Actuators and Microsystems Conference
871
874
REVIEWED
EPFL
| Event name | Event place | Event date |
ELECTR NETWORK | Jun 20-25, 2021 | |