conference paper
Micro- and nano-patterning using local deposition through miniaturized shadow mask
2003
Proceedings of 5th Korean MEMS Conference
not available
Cite this item
Kim, G. M., & Brugger, J. (2003). Micro- and nano-patterning using local deposition through miniaturized shadow mask. Proceedings of 5th Korean MEMS Conference. 5th Korean MEMS Conference, Jeju, Korea, May 16 C.E. https://infoscience.epfl.ch/handle/20.500.14299/4638
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Type
conference paper
Author(s)
Date Issued
2003
Published in
Proceedings of 5th Korean MEMS Conference
Editorial or Peer reviewed
NON-REVIEWED
Written at
EPFL
EPFL units
| Event name | Event place | Event date |
Jeju, Korea | 15-17 May, 2003 | |
Available on Infoscience
April 13, 2007
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