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conference paper

Piezo-Mems Tunable Ultra Low-Noise Laser

Attanasio, Alaina
•
Voloshin, Andrey  
•
Siddharth, Anat  
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June 29, 2025
2025 23rd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)
2025 23rd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)

In this paper, we present the first ultra-low-noise, self-injection locked (SIL) laser with frequency agility based on the monolithic integration of a low-loss silicon nitride (Si3N4) photonic spiral cavity with an aluminum nitride (AlN) actuator. The self-injection locking and stress-optic modulation of the optical cavity demonstrate a fully-integrated, packaged laser featuring frequency noise lower than fiber lasers (3-Hz intrinisic laser linewidth) and high-speed laser frequency modulation with flat frequency actuation bandwidth up to 400-kHz. This is achieved using piezoelectric stress-optic transduction of the entire 5-cm optical cavity, resulting in one of the largest piezoelectric structures, with an area of 19.8 square millimeters, operating at MHz level frequencies. We demonstrate pin-hole-free fabrication of the transducer devices and utilize a novel fabrication process called the “Band-Aid process” which removes unnecessary capacitance and allows for easier packaging and more robust wirebonding.

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Type
conference paper
DOI
10.1109/transducers61432.2025.11109653
Author(s)
Attanasio, Alaina
Voloshin, Andrey  

École Polytechnique Fédérale de Lausanne

Siddharth, Anat  

École Polytechnique Fédérale de Lausanne

Bianconi, Simone  

École Polytechnique Fédérale de Lausanne

Bancora, Andrea  

École Polytechnique Fédérale de Lausanne

Shadymov, Vladimir  

École Polytechnique Fédérale de Lausanne

Leni, Sebastien
Wang, Rui Ning  

École Polytechnique Fédérale de Lausanne

Riemensberger, Johann  

École Polytechnique Fédérale de Lausanne

Kippenberg, Tobias J.  

École Polytechnique Fédérale de Lausanne

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Date Issued

2025-06-29

Publisher

IEEE

Published in
2025 23rd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)
ISBN of the book

979-8-3315-1381-8

Start page

402

End page

405

Subjects

Piezo-MEMS

•

Optomechanics

•

Laser

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
LPQM1  
LPQM2  
Event nameEvent acronymEvent placeEvent date
2025 23rd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)

Orlando, FL, USA

2025-06-29 - 2025-07-03

FunderFunding(s)Grant NumberGrant URL

Swiss National Science Foundation

211728

Available on Infoscience
August 26, 2025
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/253559
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