conference paper
Optical microelectromechanical systems (OMEMS) based on silicon-on-insulator (SOI) technology
2002
Diffractive Optics and Micro-Optics
Type
conference paper
Author(s)
Clerc, P.-A.
Guldimann, B.
Schürmann, G.
Staufer, U.
Manzardo, O.
Marxer, C.
Date Issued
2002
Publisher
Publisher place
Washington, DC, USA
Published in
Diffractive Optics and Micro-Optics
ISBN of the book
1-55752-710-5
Series title/Series vol.
2002 Technical Digest Series
Start page
114
End page
116
Editorial or Peer reviewed
REVIEWED
Written at
OTHER
| Event name | Event place | Event date |
Tucson, Arizona, USA | 3–6 June 2002 | |
Available on Infoscience
April 22, 2009
Use this identifier to reference this record