conference paper
Micro-opto-mechanical systems: study of an array of torsional micro-mirrors in an opto-mechanical switch
1997
Diffractive Optics
Type
conference paper
Author(s)
Peter, Y.-A.
Date Issued
1997
Publisher
Published in
Diffractive Optics
Series title/Series vol.
EOS Topical Meetings Digest Series; 12
Start page
226
End page
227
Written at
OTHER
EPFL units
Available on Infoscience
April 22, 2009
Use this identifier to reference this record