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  4. Integration of Co Nanomagnets for Localized EDSR in Scalable FDSOI Spin Qubit Architectures
 
conference paper

Integration of Co Nanomagnets for Localized EDSR in Scalable FDSOI Spin Qubit Architectures

Bersano, F.  
•
Aldeghi, M.
•
Martinolli, N.  
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February 18, 2025
2024 IEEE International Electron Devices Meeting (IEDM)
2024 International Electron Devices Meeting

In this study, we validate the integration of thin cobalt (Co) nanomagnets in a front-end-of-line (FEOL) compatible process for electric dipole spin resonance (EDSR) manipulation in Si spin qubits. We designed, fabricated and electrically characterized three compact spin qubit architectures with Co nanomagnets on Fully Depleted Silicon-on-Insulator (FDSOI). The gate-first integration is investigated using x-ray spectroscopy and diffraction, and high-low frequency capacitive characterization to explore key process integration parameters. Electron holography measurements confirmed the remanent magnetization of horseshoe nanomagnets as most suited for low field operation, in agreement with micromagnetic simulations. These findings demonstrate the feasibility of compact Co FEOL integration in nanowires, FinFETs, and 2D planar spin qubit architectures.

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Type
conference paper
DOI
10.1109/IEDM50854.2024.10872990
Author(s)
Bersano, F.  

EPFL

Aldeghi, M.

IBM Research - Zurich

Martinolli, N.  

EPFL

Boureau, V.  

EPFL

Allenspach, R.

IBM Research - Zurich

Salis, G.

IBM Research - Zurich

Date Issued

2025-02-18

Publisher

IEEE

Published in
2024 IEEE International Electron Devices Meeting (IEDM)
DOI of the book
10.1109/IEDM50854.2024
ISBN of the book

979-8-3503-6542-9

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
NANOLAB  
CIME  
Event nameEvent acronymEvent placeEvent date
2024 International Electron Devices Meeting

IEDM

San Francisco, California, USA

2024-12-07 - 2024-12-11

FunderFunding(s)Grant NumberGrant URL

Swiss National Science Foundation

NCCR SPIN (phase II)

225153

https://data.snf.ch/grants/grant/225153
Available on Infoscience
February 24, 2025
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/247147
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