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research article

FinFET for high sensitivity ion and biological sensing applications

Rigante, Sara  
•
Lattanzio, Livio  
•
Ionescu, Adrian M.  
2011
Microelectronic Engineering

A double-gate (DG) fin field effect transistor (FinFET) is discussed as new label-free ion and biological sensor. Simulations as function of channel doping, geometrical dimensions, operation point and materials investigated the device response to an external potential difference which provides a body threshold voltage modulation. The simulation results presented in this work clearly state the key features for an ultrasensitive FET based sensor: an enhancement low doped and partially gated transistor operating in weak-moderate inversion regime. The optimized sensitivity, obtained when the width of the fin is equal to the gate height (W-NW similar to h(g)), reaches a value of 85% for an extraction current, I-d, of 0.1 mu A. These results pave the way for the fabrication process of an innovative CMOS compatible sensing system. (C) 2011 Elsevier B.V. All rights reserved.

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Type
research article
DOI
10.1016/j.mee.2010.12.064
Web of Science ID

WOS:000293663400055

Author(s)
Rigante, Sara  
•
Lattanzio, Livio  
•
Ionescu, Adrian M.  
Date Issued

2011

Published in
Microelectronic Engineering
Volume

88

Start page

1864

End page

1866

Subjects

FinFET

•

Bio-sensing

•

Sensitivity

•

Top insulator layer

•

Channel doping

•

Geometrical dimensions

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
NANOLAB  
Available on Infoscience
December 16, 2011
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/73618
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