conference paper
Silicon nanowires with lateral uniaxial tensile stress profiles for high electron mobility gate-all-around MOSFETs
2009
The 35th international conference on Micro Nano Engineering
Type
conference paper
Author(s)
Dobrosz, Peter
Olsen, Sarah
Date Issued
2009
Published in
The 35th international conference on Micro Nano Engineering
Editorial or Peer reviewed
NON-REVIEWED
Written at
EPFL
EPFL units
| Event name | Event place | Event date |
Ghent, Belgium | 28 Sep.-1 Oct. 2009 | |
Available on Infoscience
March 1, 2012
Use this identifier to reference this record