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  4. Quasi-dry Release for Micro Electro-Mechanical Systems
 
conference paper

Quasi-dry Release for Micro Electro-Mechanical Systems

Zickar, M.
•
Noell, W.  
•
Overstolz, T.
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2005
10th International Commercialization of Micro and Nano Systems Conference (COMS 2005)
  • Details
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Type
conference paper
Author(s)
Zickar, M.
Noell, W.  
Overstolz, T.
Spörl, C.
de Rooij, N. F.  
Date Issued

2005

Published in
10th International Commercialization of Micro and Nano Systems Conference (COMS 2005)
Start page

611

End page

616

Editorial or Peer reviewed

NON-REVIEWED

Written at

OTHER

EPFL units
SAMLAB  
Available on Infoscience
May 12, 2009
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/40037
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