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research article

A Thin-Film Pyroelectric Detector

Bell, A.
•
Huang, Y.
•
Paul, O.
Show more
1995
Integrated Ferroelectrics

A dual element, point, infra-red detector is being developed from a sol-gel deposited PbTiO3 thin-film on a micro-machined silicon substrate. Patterning of the ferroelectric film and the electrodes is accomplished by photolithographic techniques. Membranes to reduce the thermal conduction from the sensor elements are created in the underlying substrate by anisotropic etching of the silicon. The measured voltage responsivity (R(V)) as a function of radiation modulation frequency is compared to theoretical predictions and to conventional pyroelectric detector characteristics. Optimisation of the performance with respect to the device design is discussed.

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Type
research article
DOI
10.1080/10584589508019367
Web of Science ID

WOS:A1995QW49900020

Author(s)
Bell, A.
Huang, Y.
Paul, O.
Nemirovsky, Y.
Setter, N.  
Date Issued

1995

Published in
Integrated Ferroelectrics
Volume

6

Issue

1-4

Start page

231

End page

240

Subjects

ceramics

•

pbtio3

Note

Bell, A Ecole Polytech Fed Lausanne,Ceram Lab,Ch-1015 Lausanne,Switzerland Eth Zurich,Phys Electr Lab,Zurich,Switzerland Technion Israel Inst Technol,Dept Electr Engn,Haifa,Israel

Qw499

Cited References Count:9

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
LC  
Available on Infoscience
August 21, 2006
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/233251
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