Repository logo

Infoscience

  • English
  • French
Log In
Logo EPFL, École polytechnique fédérale de Lausanne

Infoscience

  • English
  • French
Log In
  1. Home
  2. Academic and Research Output
  3. Journal articles
  4. A numerical simulation on a pneumatic air table realized by micro-EDM
 
research article

A numerical simulation on a pneumatic air table realized by micro-EDM

Hirata, T.
•
Guenat, O.
•
Akashi, T.
Show more
1999
Journal of Microelectromechanical Systems

This paper presents a numerical simulation of the flow field on a one-dimensional pneumatic actuator. Unlike conventional actuators, this model uses dynamic pressure instead of friction to drive a slider. The objective of this simulation is to know the detail of the flow field under the slider as well as the influence of its levitation on the horizontal transportation. Secondary vortices to be formed under the slider may cause an instability of the slider movement. To further assure a stable transportation of the slider, absence of secondary vortices in the gap is desirable, which can be achieved by narrowing the gap width. However, a too narrow gap might cause a significant increase of flow impedance and thus sacrifice the horizontal transportation. Here, two cases with gap width of 100 and 50 μm were investigated. With a gap width of 50 μm, there was no secondary vortex formed; however, the horizontal transportation was greatly sacrificed. In contrast, with a gap width of 100 μm, there were formed several secondary vortices of a size one to two times the gap width. However, the horizontal driving force was about eight times larger than that in the case of a gap width of 50 μm.

  • Details
  • Metrics
Type
research article
DOI
10.1109/84.809068
Author(s)
Hirata, T.
Guenat, O.
Akashi, T.
Grétillat, M.-A.
de Rooij, N. F.  
Date Issued

1999

Publisher

Institute of Electrical and Electronics Engineers

Published in
Journal of Microelectromechanical Systems
Volume

8

Issue

4

Start page

523

End page

528

Note

210

Editorial or Peer reviewed

REVIEWED

Written at

OTHER

EPFL units
SAMLAB  
Available on Infoscience
May 12, 2009
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/39390
Logo EPFL, École polytechnique fédérale de Lausanne
  • Contact
  • infoscience@epfl.ch

  • Follow us on Facebook
  • Follow us on Instagram
  • Follow us on LinkedIn
  • Follow us on X
  • Follow us on Youtube
AccessibilityLegal noticePrivacy policyCookie settingsEnd User AgreementGet helpFeedback

Infoscience is a service managed and provided by the Library and IT Services of EPFL. © EPFL, tous droits réservés