research article
Integrated Circuit Compatible Electrostatic Polysilicon Microrelays
Type
research article
Author(s)
Date Issued
1995
Published in
Volume
5
Start page
156
End page
160
Note
125
Editorial or Peer reviewed
REVIEWED
Written at
OTHER
EPFL units
Available on Infoscience
May 12, 2009
Use this identifier to reference this record