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  4. Fragmented Membrane MEM Bulk Lateral Resonators with nano-gaps on 1.5 mu m SOI
 
conference paper

Fragmented Membrane MEM Bulk Lateral Resonators with nano-gaps on 1.5 mu m SOI

Badila-Ciressan, N. D.  
•
Mazza, M.  
•
Grogg, D.
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2007
Essderc 2007: Proceedings Of The 37Th European Solid-State Device Research Conference
37th European Solid-State Device Research Conference

The design, fabrication and experimental investigation of 21MHz MEM Bulk Lateral Resonators (BLR) on 1.5 mu m Silicon-On-Insulator (SOI) Fragmented Membranes with 100nm air-gaps are reported(#). Quality factors as high as 33'000 are measured under vacuum at room temperature, with 20V DC bias and low AC-power. The influence of temperature on the resonance frequency and quality factor is studied and discussed from 80K and 380K. A very high quality factor of 182'000 and a motional resistance of 165k Omega, are reported at 80K. The paper shows that high-quality factor MEM resonator can be integrated on partially-depleted thin SOI, which demonstrates the possibility of making full-integrated hybrid MEM-CMOS integrated circuits for future communication applications.

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Type
conference paper
DOI
10.1109/ESSDERC.2007.4430970
Web of Science ID

WOS:000252831900098

Author(s)
Badila-Ciressan, N. D.  
Mazza, M.  
Grogg, D.
Ionescu, A. M.  
Date Issued

2007

Publisher

Ieee Service Center, 445 Hoes Lane, Po Box 1331, Piscataway, Nj 08855-1331 Usa

Published in
Essderc 2007: Proceedings Of The 37Th European Solid-State Device Research Conference
ISBN of the book

978-1-4244-1123-8

Series title/Series vol.

Proceedings of the European Solid-State Device Research Conference

Start page

430

End page

433

Editorial or Peer reviewed

NON-REVIEWED

Written at

EPFL

EPFL units
NANOLAB  
Event nameEvent placeEvent date
37th European Solid-State Device Research Conference

Munich, GERMANY

Sep 11-13, 2007

Available on Infoscience
July 4, 2012
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/83569
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