conference paper not in proceedings
Digital holographic microscopy for micro-systems investigation in near infrared
2009
We have demonstrated the suitability of digital holographic microscopy (DHM) with near infra-red illumination for micro-optical elements and silicon micro-systems characterization, opening a wide field of quality control applications.
Type
conference paper not in proceedings
Author(s)
Date Issued
2009
Publisher
ISBN of the book
978-3-00-024191-8
Subjects
Editorial or Peer reviewed
NON-REVIEWED
Written at
EPFL
EPFL units
| Event name | Event place | Event date |
Capri, Italy | September 27-30, 2009 | |
Available on Infoscience
March 15, 2010
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