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  4. Monolithic Piezoceramic Flexible Structures for Micromanipulation
 
conference paper

Monolithic Piezoceramic Flexible Structures for Micromanipulation

Breguet, Jean-Marc  
•
Henein, Simon  
•
Mericio, Roberto
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1997
Proceedings of the 9th Int. Precision Engineering Seminar & 4th Int. Conf. On Ultraprecision in Manufacturing Engineering
9th Int. Precision Engineering Seminar & 4th Int. Conf. On Ultraprecision in Manufacturing Engineering

This paper presents several flexible structures cut directly into piezoelectric ceramics. Some parts of these structures are active while other play the role of joints or levers. With this innovative technology, this displacement of the piezos has been amplified by a ratio greater than 50 to 1. The actuating principle is discussed and the following three prototypes are presented. A micro-gripper with an integrated force sensor and a X-Y stage have been tested and characterized. A micro-robot actuated by Stick & Slip has also been developed taking advantage of this new technology. We believe that this new approach is of promise in the micro-manipulation and Scanning Probe Microscopy (SPM) fields.

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1997_Monolithic Piezoceramic Flexible Structures for Micromanipulation.pdf

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