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  4. A Comprehensive Analysis of Combined AFM/SEM Systems for <i>In-Situ</i> Nanoscale Characterizations and Multiparametric Correlative Microscopy
 
research article

A Comprehensive Analysis of Combined AFM/SEM Systems for In-Situ Nanoscale Characterizations and Multiparametric Correlative Microscopy

Swain, Prabhu Prasad  
•
Penedo, Marcos  
•
Fantner, Georg Ernest  
November 12, 2025
Microscopy and Microanalysis

Since their discovery, scanning probe microscopy (SPM) and scanning electron microscopy (SEM) techniques have been extensively employed across diverse research fields for nanoscale characterization and analysis. While their ex-situ combination has been widely used, the in-situ integration of the two techniques has gained significant traction in recent years. This review highlights the journey of bringing the complementary capabilities of these two instruments into a single platform, with the focus on extracting correlative, multiparametric, and multidimensional information from samples. We discuss key technological advancements, including mechanical integration, readout electronics, imaging modes, and speed optimization, toward the realization of a consistent SPM/SEM hybrid system. Finally, we highlight how such an integrated approach addresses the growing demand for richer nanoscale insights across disciplines ranging from chemical physics to biochemistry.

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Type
research article
DOI
10.1093/mam/ozaf110
Author(s)
Swain, Prabhu Prasad  

École Polytechnique Fédérale de Lausanne

Penedo, Marcos  

École Polytechnique Fédérale de Lausanne

Fantner, Georg Ernest  

École Polytechnique Fédérale de Lausanne

Date Issued

2025-11-12

Publisher

Oxford University Press (OUP)

Published in
Microscopy and Microanalysis
Volume

31

Issue

6

Article Number

ozaf110

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
LBNI  
Available on Infoscience
November 13, 2025
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/255820
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