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  4. Digital Holographic Microscopy (DHM) for metrology and dynamic characterization of MEMS and MOEMS
 
conference paper

Digital Holographic Microscopy (DHM) for metrology and dynamic characterization of MEMS and MOEMS

Emery, Y.
•
Cuche, E.  
•
Marquet, F.
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2006
Mems, Moems, and Micromachining II
Photonics Europe

Digital Holographic Microscopes (DHM) enables recording the whole information necessary to provide real time nanometric vertical displacement measurements with a single image acquisition. The use of fast acquisition camera or stroboscopic acquisition mode makes these new systems ideal tools for investigating the topography and dynamical behavior of MEMS and MOEMS. This is illustrated by the investigation of resonant frequencies of a dual axis micromirror. This enables the definition of the linear, non-linear, and modal resonance zones of its dynamical response.

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Type
conference paper
DOI
10.1117/12.660029
Author(s)
Emery, Y.
Cuche, E.  
Marquet, F.
Aspert, N.
Marquet, P.
Kühn, J.
Botkine, M.
Colomb, T.  
Montfort, F.  
Charrière, F.  
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Date Issued

2006

Publisher

SPIE

Published in
Mems, Moems, and Micromachining II
ISBN of the book

0-8194-6242-X

Volume

6186

Start page

N1860

End page

N1860

Subjects

[MVD]

•

Digital Holography Microscopy

•

MEMS

•

MOEMS

•

real time 3D optical

•

topography

URL

URL

http://spie.org/x648.html?product_id=660029
Editorial or Peer reviewed

NON-REVIEWED

Written at

EPFL

EPFL units
LOA  
Event nameEvent placeEvent date
Photonics Europe

Strasbourg

April 3-7, 2006

Available on Infoscience
July 20, 2009
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/41614
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