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  4. On-Chip Two-Phase Cooling with Refrigerant 85 mu m-Wide Multi-Microchannel Evaporator Under Hot-Spot Conditions
 
research article

On-Chip Two-Phase Cooling with Refrigerant 85 mu m-Wide Multi-Microchannel Evaporator Under Hot-Spot Conditions

Costa-Patry, Etienne  
•
Nebuloni, Stefano
•
Olivier, Jonathan  
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2012
Ieee Transactions On Components Packaging And Manufacturing Technology

Hot-spots are present in micro-electronics and are challenging to cool effectively. This paper presents highly nonuniform heat flux measurements obtained for a pseudo-CPU with 35 local heaters and temperature sensors cooled by a silicon multi-microchannel evaporator with 85 mu m wide and 560 mu m high channels separated by 46 mu m wide fins. A low pressure dielectric refrigerant, R245fa, was used as evaporating test fluid. The base heat flux was varied from 6 to 160 W/cm(2) and the junction temperature always remained below 65 degrees C, while the fluid inlet saturation temperature was 30.5 degrees C. On-chip two-phase cooling was found to very effectively cool the hot-spots without inducing flow instabilities. Building on analogous uniform heat flux tests made on the same test section, the effects of position, orientation size, and strength of the hot-spots were analyzed.

  • Details
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Type
research article
DOI
10.1109/TCPMT.2011.2173572
Web of Science ID

WOS:000300196600016

Author(s)
Costa-Patry, Etienne  
Nebuloni, Stefano
Olivier, Jonathan  
Thome, John Richard  
Date Issued

2012

Published in
Ieee Transactions On Components Packaging And Manufacturing Technology
Volume

2

Start page

311

End page

320

Subjects

Hot-spots

•

micro-cooling

•

nonuniform heat flux

•

refrigerants

•

thermal management

•

two-phase flow cooling

•

Heat-Transfer Model

•

Flow

•

Flux

•

R236Fa

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
LTCM  
Available on Infoscience
March 15, 2012
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/78814
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