Interferometer Scanning Mirror Mechanism
The CSEM has developed an optomechanical linear scanner. This scanner has a limited displacement range, performed with high resolution. The resolution is obtained through a very high precision motion guiding of the scanner itself. This paper describes the main features of the scanner system as well as its control system. After a complete description of the system, a state space model derived from the mechanical and electrical equations of the system is introduced. This model will be used for the design of a state space controller based on a pole placement algorithm, to make the system behave as a fourth order Bessel filter. To better track the desired reference trajectory, a feedforward will be added to the controller.
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Onillon, E., Henein, S., Theurillat, P., Krauss, J., & Kjelberg, I. (2002). Interferometer Scanning Mirror Mechanism. IFAC Proceedings Volumes, 35(Issue 2), 829–833. https://doi.org/10.1016/S1474-6670(17)34042-9
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