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  4. Magnetic Nanocrystals Modified Epoxy Photoresist for fabrication of NEMS and MEMS
 
conference paper

Magnetic Nanocrystals Modified Epoxy Photoresist for fabrication of NEMS and MEMS

Martin, Cristina
•
Ingrosso, Chiara
•
Llobera, Andreu
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2008
34th International Conference on Micro and Nano Engineering (MNE'2008)
34th International Conference on Micro and Nano Engineering (MNE'2008)
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Type
conference paper
Author(s)
Martin, Cristina
Ingrosso, Chiara
Llobera, Andreu
Perez-Murano, Francesc
Sangregorio, Claudio
Brugger, Juergen  
Striccoli, Marinella
Agostiano, Angela
Curri, M. Lucia
Date Issued

2008

Published in
34th International Conference on Micro and Nano Engineering (MNE'2008)
URL

URL

http://www.mne08.org/
Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
LMIS1  
Event nameEvent placeEvent date
34th International Conference on Micro and Nano Engineering (MNE'2008)

Athens, Greece

September 15-18, 2008

Available on Infoscience
June 3, 2009
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/40331
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