conference paper
Magnetic Nanocrystals Modified Epoxy Photoresist for fabrication of NEMS and MEMS
2008
34th International Conference on Micro and Nano Engineering (MNE'2008)
Cite this item
Martin, C., Ingrosso, C., Llobera, A., Perez-Murano, F., Sangregorio, C., Brugger, J., Striccoli, M., Agostiano, A., & Curri, M. L. (2008). Magnetic Nanocrystals Modified Epoxy Photoresist for fabrication of NEMS and MEMS. 34th International Conference on Micro and Nano Engineering (MNE′2008). 34th International Conference on Micro and Nano Engineering (MNE′2008), Athens, Greece. https://infoscience.epfl.ch/handle/20.500.14299/40331
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Type
conference paper
Author(s)
Martin, Cristina
Ingrosso, Chiara
Llobera, Andreu
Perez-Murano, Francesc
Sangregorio, Claudio
Striccoli, Marinella
Agostiano, Angela
Curri, M. Lucia
Date Issued
2008
Published in
34th International Conference on Micro and Nano Engineering (MNE'2008)
URL
Editorial or Peer reviewed
REVIEWED
Written at
EPFL
EPFL units
| Event name | Event place | Event date |
Athens, Greece | September 15-18, 2008 | |
Available on Infoscience
June 3, 2009
Use this identifier to reference this record