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  4. Coupling Effects of Crosstalk and Parasitic Loss on Capacitive Micromachined Ultrasonic Transducers
 
research article

Coupling Effects of Crosstalk and Parasitic Loss on Capacitive Micromachined Ultrasonic Transducers

Zhao, Yihe  
•
Li, Zhikang
•
Li, Jie
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February 15, 2022
Ieee Sensors Journal

Capacitive micromachined ultrasonic transducers (CMUTs) have been widely utilized in applications of biomolecule monitoring, ultrasound medical diagnosis, and ultrasound therapy because of their advantages in high-level integration with integrated circuits, good impedance matching for acoustic transmission, and flexible element and array configuration compared with conventional piezoelectric ceramic transducers. Crosstalk effects on dynamics of a CMUT element, i.e. electrical, mechanical, and acoustic performance, would lead to unexpected spurious resonances. In this study, the mutual interaction from fluid and nearby cells in a CMUT element is newly investigated specially aiming to characterize their coupling effects with series and parallel parasitic effects based on a nonlinear Equivalent Circuit Model (ECM). The mutual interaction is evaluated with the electromechanical and acoustic characteristics by comparison between ECM and 3D Finite Element Analysis (FEA). Two representative CMUT element configurations, that are the rectangular with nine cells and the hexagonal with seven cells, are analyzed with different center-to-center distance. The radii of cells are set to be lambda 8 with different edge-to-edge distances. The parasitic effects are modeled by a series parasitic factor and a parallel-capacitance parasitic ratio. The coupling influence of crosstalk and parasitic effects on the performance of a CMUT element is evaluated, such as the impedance, phase, conductance, velocity, and ultrasound pressure field. The results of ECM-FEA-based methods show good agreements, and the improved ECM can be used for co-parasitic extraction with front-end interface.

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Type
research article
DOI
10.1109/JSEN.2022.3140649
Web of Science ID

WOS:000754264700046

Author(s)
Zhao, Yihe  
Li, Zhikang
Li, Jie
Zhao, Libo
Liu, Zichen
Lu, Dejiang
Li, Zixuan
Yuan, Jiawei
Yang, Ping
Jiang, Zhuangde
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Date Issued

2022-02-15

Publisher

IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC

Published in
Ieee Sensors Journal
Volume

22

Issue

4

Start page

3281

End page

3297

Subjects

Engineering, Electrical & Electronic

•

Instruments & Instrumentation

•

Physics, Applied

•

Engineering

•

Instruments & Instrumentation

•

Physics

•

impedance

•

crosstalk

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finite element analysis

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couplings

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ultrasonic imaging

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fluids

•

acoustics

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crosstalk

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radiation impedance

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parasitic effects

•

capacitive micromachined ultrasonic transducers

•

equivalent circuit model

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finite element analysis

•

phased-array system

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circuit model

•

cmut arrays

•

chip

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

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March 14, 2022
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/186341
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