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  4. Characterization of a Piezoelectric AlN Beam Array in Air and Fluid for an Artificial Basilar Membrane
 
research article

Characterization of a Piezoelectric AlN Beam Array in Air and Fluid for an Artificial Basilar Membrane

Jeon, Hyejin
•
Jang, Jongmoon  
•
Kim, Sangwon
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March 1, 2018
Electronic Materials Letters

In this study, we present a piezoelectric artificial basilar membrane (ABM) composed of a 10-channel aluminum nitride beam array. Each beam varies in length from 1306 to 3194 mu m for mimicking the frequency selectivity of the cochlea. To characterize the frequency selectivity of the ABM, we measured the mechanical displacement and piezoelectric output while applying acoustic stimulus at 100 dB sound pressure level in the range of 500 Hz-40 kHz. The resonance frequencies measured by mechanical displacement and piezoelectric output were in the range of 10.56-36.5 and 10.9-37.0 kHz, respectively. In addition, the electrical stimulus was applied to the ABMs to compare the mechanical responses in air and fluid. The measured resonance frequencies were in the range of 11.1-47.7 kHz in the air and 3.10-11.9 kHz in the fluid. Understanding the characteristics of the ABM is important for its potential use as a key technology for auditory prostheses.

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Type
research article
DOI
10.1007/s13391-018-0012-7
Web of Science ID

WOS:000428080500003

Author(s)
Jeon, Hyejin
Jang, Jongmoon  
Kim, Sangwon
Choi, Hongsoo
Date Issued

2018-03-01

Publisher

KOREAN INST METALS MATERIALS

Published in
Electronic Materials Letters
Volume

14

Issue

2

Start page

101

End page

111

Subjects

Materials Science, Multidisciplinary

•

Materials Science

•

artificial basilar membrane (abm)

•

piezoelectric

•

aln

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frequency selectivity

•

xef2 dry etching

•

residual stress

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frequency-selectivity

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cochlear implants

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acoustic sensor

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model

•

[GRAPHICS]

Editorial or Peer reviewed

REVIEWED

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December 13, 2018
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/152444
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