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Savu, V., Kivioja, J., Ahopelto, J., & Brugger, J. (2009). Quick and Clean: Stencil Lithography for Wafer-Scale Fabrication of Superconducting Tunnel Junctions. IEEE Transactions on Applied Superconductivity, 19(3), 242–244. https://doi.org/10.1109/TASC.2009.2019075

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