conference paper

Low Impedance ALD HfO2 Partially-Filled-Gap Flexural and Bulk MEMS Resonators Piezoresistively Detected for Distributed Mass Sensing

Lopez, Mariazel Maqueda
•
Casu, Emanuele Andrea  
•
Fernandez-Bolanos, Montserrat
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2017
Proceedings
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proceedings-01-00391-v2.pdf

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Postprint

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http://purl.org/coar/version/c_ab4af688f83e57aa

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openaccess

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971.12 KB

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Adobe PDF

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