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  4. Single-photon avalanche diode fabricated in standard 55 nm bipolar-CMOS-DMOS technology with sub-20 V breakdown voltage
 
research article

Single-photon avalanche diode fabricated in standard 55 nm bipolar-CMOS-DMOS technology with sub-20 V breakdown voltage

Ha, Won-yong  
•
Park, Eunsung
•
Eom, Doyoon
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April 24, 2023
Optics Express

This paper presents a single-photon avalanche diode (SPAD) in 55 nm bipolar-CMOSDMOS (BCD) technology. In order to realize a SPAD having sub-20 V breakdown voltage for mobile applications while preventing high tunneling noise, a high-voltage N-well available in BCD is utilized to implement the avalanche multiplication region. The resulting SPAD has a breakdown voltage of 18.4 V while achieving an excellent dark count rate of 4.4 cps/mu m2 at the excess bias voltage of 7 V in spite of the advanced technology node. At the same time, the device achieves a high peak photon detection probability (PDP) of 70.1% at 450 nm thanks to the high and uniform E-field. Its PDP values at 850 and 940 nm, wavelengths of interest for 3D ranging applications reach 7.2 and 3.1%, respectively, with the use of deep N-well. The timing jitter of the SPAD, full width at half maximum (FWHM), is 91 ps at 850 nm. It is expected that the presented SPAD enables cost-effective time-of-flight and LiDAR sensors with the advanced standard technology for many mobile applications.

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Type
research article
DOI
10.1364/OE.485424
Web of Science ID

WOS:000988193100001

Author(s)
Ha, Won-yong  
Park, Eunsung
Eom, Doyoon
Park, Hyo-Sung
Chong, Daniel
Tan, Shyue Seng
Tng, Michelle
Quek, Elgin
Bruschini, Claudio  
Charbon, Edoardo  
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Date Issued

2023-04-24

Publisher

Optica Publishing Group

Published in
Optics Express
Volume

31

Issue

9

Start page

13798

End page

13805

Subjects

Optics

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
AQUA  
Available on Infoscience
June 19, 2023
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/198425
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