research article
Frame structure for thin-film piezoelectric-on-silicon resonator to greatly enhance quality factor and suppress spurious modes
Type
research article
Web of Science ID
WOS:000431161500012
Author(s)
Bao, FH
Bao, LL
Zhang, XS
Zhang, C
Li, XY
Qin, F
Zhang, T
Zhang, Y
Wu, ZH
Bao, JF
Date Issued
2018
Publisher
Published in
Volume
274
Start page
101
End page
108
Editorial or Peer reviewed
REVIEWED
Written at
EPFL
EPFL units
Available on Infoscience
November 8, 2018
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