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research article
Frame structure for thin-film piezoelectric-on-silicon resonator to greatly enhance quality factor and suppress spurious modes
Type
research article
Web of Science ID
WOS:000431161500012
Authors
Bao, FH
•
Bao, LL
•
Zhang, XS
•
Zhang, C
•
Li, XY
•
Qin, F
•
Zhang, T
•
Zhang, Y
•
Wu, ZH
•
Bao, JF
Publication date
2018
Published in
Volume
274
Start page
101
End page
108
Peer reviewed
REVIEWED
Written at
EPFL
EPFL units
Available on Infoscience
November 8, 2018
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