High-Q factor RF planar microcoils for micro-scale NMR spectroscopy
We present the design, fabrication and test of high-Q factor radiofrequency planar microcoils for nuclear magnetic resonance (NMR) spectroscopy in small volume samples. The coils are fabricated on glass wafers using high-aspect ratio SU-8 photoepoxy and copper electroplating. On-wafer electrical characterization shows quality factors up to 40 at 800 MHz. A 500 μm diameter microcoil with a measured quality factor of 24 at 300 MHz is mounted on a printed circuit board and electrically contacted using aluminum wire bonding. This probe is inserted in a 7 T-superconducting magnet, and a 1H-NMR spectrum of 160 nl ethylbenzene contained in a capillary placed over the microcoil is acquired in a single scan. This work is an important step towards the integration of NMR detection into micro-total analysis systems (μTAS).
Cite this item
Massin, C., Boero, G., Vincent, F., Abenhaim, J., Besse, P.-A., & Popovic, R. S. (2002). High-Q factor RF planar microcoils for micro-scale NMR spectroscopy. Sensors and Actuators A: Physical, 97-98, 280–288. https://doi.org/10.1016/S0924-4247(01)00847-0
Click Copy to copy the citation, or select the text manually.
2002
97-98
280
288
NON-REVIEWED
EPFL