A 3D-Printed Functional Mems Accelerometer
3D printing of MEMS devices could enable the cost-efficient production of custom-designed and complex 3D MEMS for prototyping and for low-volume applications. In this work, we present the first micro 3D-printed functional MEMS accelerometers using two-photon polymerization combined with the evaporation of metal strain gauge transducers. We measured the resonance frequency, the responsivity, and the signal stability over a period of 10 h of the 3D-printed accelerometer.
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Pagliano, S., Marschner, D. E., Maillard, D., Ehrmann, N., Stemme, G., Braun, S., Villanueva, L. G., & Niklaus, F. (2023). A 3D-Printed Functional Mems Accelerometer. 2023 Ieee 36Th International Conference on Micro Electro Mechanical Systems, Mems, Proceedings IEEE Micro Electro Mechanical Systems, 594–597. https://doi.org/10.1109/MEMS49605.2023.10052385
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WOS:000975359200156
2023-01-01
New York
978-1-6654-9308-6
Proceedings IEEE Micro Electro Mechanical Systems
594
597
REVIEWED
EPFL
| Event name | Event place | Event date |
Munich, GERMANY | Jan 15-19, 2023 | |