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  4. Two Dimensional Array of Nanomechanical Membrane-type Surface Stress Sensor (MSS) with Improved Sensitivity
 
research article

Two Dimensional Array of Nanomechanical Membrane-type Surface Stress Sensor (MSS) with Improved Sensitivity

Yoshikawa, Genki
•
Akiyama, Terunobu  
•
Loizeau, Frédéric  
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2012
Sensors

We present a new generation of nanomechanical membrane-type surface stress sensor (MSS) chip, which has a two dimensional (2D) array of MSS on a single chip. The implementation of several techniques in design and microfabrication improves the sensitivity, achieving 3~4 times higher sensitivity than the first generation MSS chip and exceeding ~100 times sensitivity compared to a standard cantilever-type sensor. Since the integrated piezoresistive read-out can meet the practical requirements, such as small and simple without expensive peripheral devices, the MSS is one of the most promising transducers for nanomechanical sensing, providing various opportunities of practical applications in a wide range of fields, such as for the growing demands in medical, security, and environmental issues.

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Name

1424-8220-12-11-15873.pdf

Type

Publisher's Version

Version

http://purl.org/coar/version/c_970fb48d4fbd8a85

Access type

openaccess

License Condition

CC BY

Size

1.13 MB

Format

Adobe PDF

Checksum (MD5)

65c84e2910ce68fa7647b0f462ba215a

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