conference presentation
Fabrication of functional structures on thin silicon nitride membranes
2002
not available
Cite this item
Ekkels, P., Tjerkstra, R. W., Krijnen, G. J. M., Berenschot, J. W., Brugger, J., & Elwenspoek, M. C. (2002). Fabrication of functional structures on thin silicon nitride membranes [Conference Presentation]. Micro- and Nano Engineering 2002 International Conference (MNE2002), Lugano, Switzerland, July 17 C.E. https://infoscience.epfl.ch/handle/20.500.14299/3368
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Type
conference presentation
Author(s)
Date Issued
2002
Written at
EPFL
EPFL units
| Event name | Event place | Event date |
Lugano, Switzerland | 16-19 Sept, 2002 | |
Available on Infoscience
March 2, 2007
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