conference presentation
Fabrication of functional structures on thin silicon nitride membranes
2002
not available
Type
conference presentation
Author(s)
Date Issued
2002
Written at
EPFL
EPFL units
| Event name | Event place | Event date |
Lugano, Switzerland | 16-19 Sept, 2002 | |
Available on Infoscience
March 2, 2007
Use this identifier to reference this record