conference paper
CVD deposited TA2O5 and HfO2 layers as pH-sensitive layers for ISFETs
2006
IMCS The 11th International Meeting on Chemical Sensors
Type
conference paper
Author(s)
Mondin, G.
Jenny, S.
Jeanneret, S.
Millon, C.
Roussel, H.
Dubourdieu, C.
Date Issued
2006
Published in
IMCS The 11th International Meeting on Chemical Sensors
Editorial or Peer reviewed
NON-REVIEWED
Written at
OTHER
EPFL units
Available on Infoscience
May 12, 2009
Use this identifier to reference this record