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semester or other student projects

Fabrication and characterization of metal nanolevers made by shadow mask technology

Grogg, Daniel
2004

Evaporation through shadow masks (nanostencils) overcomes the limitations typically given by patterning methods involving conventional optical lithography and etching, such as diffraction limits and etch-selectivity. This paper demonstrates the fabrication of metal cantilevers with sub-micron dimensions using direct evaporation through miniature nanostencils, followed by dry etching to release metal nanolevers from substrate.

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Type
semester or other student projects
Author(s)
Grogg, Daniel
Date Issued

2004

Written at

EPFL

EPFL units
LMIS1  
Available on Infoscience
November 2, 2005
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/218583
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