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research article

On the use of shape memory alloy thin films to tune the dynamic response of micro-cantilevers

Kniknie, T
•
Bellouard, Yves  
•
Homburg, E
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2010
Journal of Micromechanics and Microengineering

We investigate the effect of martensitic phase transformations on the dynamic response of commercial AFM silicon cantilevers coated with shape memory alloy (SMA) thin films. We propose a simple thermo-mechanical model to predict the phase transformation. We show experimentally that the SMA thin film dynamic response can be actively changed upon heating and cooling. This can be used for vibration control in micro-systems.

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Type
research article
DOI
10.1088/0960-1317/20/1/015039
Author(s)
Kniknie, T
Bellouard, Yves  
Homburg, E
Nijmeijer, H
Wang, X
Vlassak, J J
Date Issued

2010

Published in
Journal of Micromechanics and Microengineering
Volume

20

Issue

1

Article Number

015039

Editorial or Peer reviewed

REVIEWED

Written at

OTHER

EPFL units
GALATEA  
Available on Infoscience
July 20, 2015
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/116392
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