conference paper

Quick and Clean: Stencil Lithography for Wafer-Scale Fabrication of Superconducting Tunnel Junctions

Savu, V.  
•
Brugger, J.  
•
Kivioja, J.
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2008
Applied Superconductivity Conference 2008 (ASC 2008)
Applied Superconductivity Conference 2008 (ASC 2008)
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Savu_2008_ASC.pdf

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