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Computational Design and Optimisation of Mechanically Reinforced Masks for Stencil Lithography

Lishchynska, M.
•
van den Boogaart, M.A.F.  
•
Brugger, J.  
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2007
EuroSimE 2007, Thermal, Mechanical and Multiphysics Simulation and Experiments in Micro-Electronics and Micro-Systems,
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