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  4. Assembling of Thick PZT Sheet on Silicon for Energy Harvesting Applications
 
conference poster not in proceedings

Assembling of Thick PZT Sheet on Silicon for Energy Harvesting Applications

Janphuang, Pattanaphong  
•
Isarakorn, Don  
•
Quintero, Vasquez  
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2011
Power MEMS 2011

Bulk PZT ceramics provide high electromechanical coupling (k) which is desirable for piezoelectric energy harvesters since the energy transformed from a mechanical agitation into an electrical output is proportional to k2 [1-2]. However, piezoelectric cantilever-based energy harvesters using bulk PZT require a bonding layer to couple the thick PZT sheet to the elastic layer substrate, typically silicon. We present the characteristics and performance of vibration energy harvesters comparing three different bonding interfaces: a UV cured glue (Delo 4552), BiSn soldering, and a dry foil laminated photoresist. The later is demonstrated to be advantageous as it can be easily patterned with photolithography, it has a well defined thickness, and it provides good adhesion to a variety of substrate materials (metal, glass, silicon, and plastic).

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Type
conference poster not in proceedings
Author(s)
Janphuang, Pattanaphong  
Isarakorn, Don  
Quintero, Vasquez  
Felipe, Andres
Lockhart, Robert Andrew  
Ruan, Jason  
Briand, Danick  
de Rooij, Nico  
Date Issued

2011

Written at

EPFL

EPFL units
SAMLAB  
Event nameEvent placeEvent date
Power MEMS 2011

Seoul, Korea

November 15-18, 2011

Available on Infoscience
December 20, 2011
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/75834
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