conference paper
Periodic structures with arbitrary shapes recorded by multiple beam interference
2003
Lithographic and Micromachining Techniques for Optical Component Fabrication II
Type
conference paper
Author(s)
Date Issued
2003
Published in
Lithographic and Micromachining Techniques for Optical Component Fabrication II
Series title/Series vol.
Proc. SPIE; 5183
Start page
32
End page
39
Written at
OTHER
EPFL units
Available on Infoscience
April 22, 2009
Use this identifier to reference this record