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research article

Spark assisted chemical engraving (SACE) in microfactory

Wüthrich, Rolf
•
Fujisaki, K.  
•
Couthy, Ph.
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2005
Journal of Micromechanics and Microengineering

Spark assisted chemical engraving (SACE) is a method for 3D microstructuring of glass or other non-conductive materials with high aspect ratio and smooth surface quality. It is applicable for rapid prototyping of microfluidic devices, for MEMS interfacing and similar applications. Typical feature size is in the hundreds of micrometres, down to a few tens of micrometres. It is a table-top technology requiring no clean rooms and no masks and with very modest space usage. It is thus well suited for microfactories. This paper gives a basic introduction to SACE and some machining examples.

  • Details
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Type
research article
DOI
10.1088/0960-1317/15/10/S04
Web of Science ID

WOS:000233093900005

Author(s)
Wüthrich, Rolf
Fujisaki, K.  
Couthy, Ph.
Hof, L.A.
Bleuler, Hannes  
Date Issued

2005

Published in
Journal of Micromechanics and Microengineering
Volume

15

Start page

276

End page

280

Subjects

SACE

•

Glass micromachining

•

Micro-factory

•

Robotics

•

Microengineering

•

[SACE]

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
LSRO  
Available on Infoscience
June 2, 2006
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/230289
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