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  4. The two-dimensional array of 2048 tilting micromirrors for astronomical spectroscopy
 
research article

The two-dimensional array of 2048 tilting micromirrors for astronomical spectroscopy

Canonica, M. D.  
•
Zamkotsian, F.
•
Lanzoni, P.
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2013
Journal Of Micromechanics And Microengineering

In multi-object spectrometers, field selectors, which are located in the focal plane of the telescopes, are required for the selection of astronomical objects, such as stars or faint galaxies. We present a two-dimensional micromirror array as a field selector. Object selection is achieved through the precise tilting of micromirrors, which reflect the light of objects toward the spectrometer. These arrays were composed of 2048 (32 x 64) electrostatically actuated silicon micromirrors that measured 100 x 200 mu m(2). The micromirrors were addressed either by lines or individually using a line-column addressing scheme. The fabrication process of these devices involved three wafers and two wafer-level bondings. Characterization, by white light interferometry, revealed a tilt angle of 25 degrees at a voltage of 121 V, and a coated micromirror deformation below 10 nm. A fill factor of 82% and a contrast of 1000:1 were also observed. Demonstration of the line-column addressing scheme was achieved through its application to a sub-array of 2 x 2 micromirrors.

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Type
research article
DOI
10.1088/0960-1317/23/5/055009
Web of Science ID

WOS:000317739100009

Author(s)
Canonica, M. D.  
Zamkotsian, F.
Lanzoni, P.
Noell, W.  
de Rooij, N.  
Date Issued

2013

Publisher

Institute of Physics

Published in
Journal Of Micromechanics And Microengineering
Volume

23

Issue

5

Article Number

055009

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
SAMLAB  
Available on Infoscience
October 1, 2013
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/95461
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