research article
Microfabricated Electrical Connector for Atomic Force Microscopy Probes with Integrated Sensor/Actuator
Type
research article
Author(s)
Date Issued
2002
Published in
Volume
4
Start page
4332
End page
4334
Note
281
Editorial or Peer reviewed
REVIEWED
Written at
OTHER
EPFL units
Available on Infoscience
May 12, 2009
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