conference paper
Design and Fabrication Issues in Ultra-Thin Film SOI MEMS resonators
2005
EuroSOI 2005
Type
conference paper
Author(s)
Date Issued
2005
Published in
EuroSOI 2005
Editorial or Peer reviewed
REVIEWED
Written at
EPFL
EPFL units
Available on Infoscience
May 16, 2007
Use this identifier to reference this record