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research article

A new double multiplication region method to design high sensitivity and wide spectrum SPADs in standard CMOS technologies

Karaca, Utku  
•
Kizilkan, Ekin  
•
Bruschini, Claudio  
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December 1, 2024
Scientific Reports

Designing SPADs with high sensitivity in a wide wavelength range is crucial since the applications utilizing SPAD-based sensors target different parts of the spectrum. Here, we introduce a novel technique to achieve a wider sensitivity spectrum through the insertion of a second multiplication region into the depletion region. Thanks to the proposed method, at 5.5 V excess bias voltage, the fabricated devices achieved a PDP of 78% peak at 500 nm and 25.5% at 850 nm wavelength. At the same excess bias, we measured a normalized noise of 3.7 cps/μm2 and a jitter of 165 ps at 517 nm FWHM.

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10.1038_s41598-024-78070-6.pdf

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Published version

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openaccess

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CC BY

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6.61 MB

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5a27c39497bb6656c107fc3b67c0001f

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