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research article

Microcolumn with variable axis lens for large scan fields and pixel numbers

Weigand, H.
•
Gautsch, S.  
•
Strohmaier, W.
Show more
2011
Microelectronic Engineering

A microcolumn is presented containing a variable axis lens optimized for large scan fields and pixel numbers with minimal probe sizes for the deflected beam. At beam energy of 1 keV and a working distance of 38 mm the magnifying column can address scan fields of more than 7 x 7 mm(2) employing dynamic correction. Simulations of the design predict a probe diameter of 75 nm on axis up to similar to 1 mu m for a beam being deflected 5 mm of axis, assuming a field emission source. Within a scan field of 3 x 3 mm(2) this microcolumn could address over 1 gigapixels of less than 100 nm in size. Tests of the column, using the 135 nm probe of a SEM as the source, resulted in a beam size of similar to 720 nm on axis and up to 1.1 mu m for a beam deflected 5 mm off axis, consistent with simulations. (C) 2011 Elsevier B.V. All rights reserved.

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Type
research article
DOI
10.1016/j.mee.2010.12.120
Web of Science ID

WOS:000293663400198

Author(s)
Weigand, H.
Gautsch, S.  
Strohmaier, W.
Blideran, M.
Staufer, U.
de Rooij, N. F.  
Kern, D. P.
Date Issued

2011

Publisher

Elsevier

Published in
Microelectronic Engineering
Volume

88

Issue

8

Start page

2431

End page

2434

Subjects

Microcolumn

•

Mulibeam

•

Maskless lithography

•

Variable axis lens

•

Miniaturized electron optics

•

Electron-Microscope

•

Systems

•

Design

Editorial or Peer reviewed

NON-REVIEWED

Written at

EPFL

EPFL units
SAMLAB  
Available on Infoscience
August 9, 2011
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/69934
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